Sputtering of Vacuum Deposited Metal Films by Oxygen Ion Bombardment
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چکیده
منابع مشابه
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ژورنال
عنوان ژورنال: Journal of the Mass Spectrometry Society of Japan
سال: 1978
ISSN: 1884-3271,1340-8097
DOI: 10.5702/massspec1953.26.83